Thin Film/Coating Products Metrology Surplus Optics Site Map

 

[RTI Bibliography]

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Please see our Products and Sales page for details on these services.


 

RTI DEVELOPMENT AND MODELING SOFTWARE:

Rugate Technologies, Inc. uses a full suite of software and many years of experience to support filter design development and modeling.

 

Design Program

Source

Description

OptiLayer
OptiLayer Ltd.

OptiLayer Ltd.

Optical filter design and modeling.

Opti-Char
OptiLayer Ltd.

OptiLayer Ltd.

Used to calculate optical properties from single layers.

Opti-Rel
OptiLayer Ltd.

OptiLayer Ltd.

Used to calculate potential errors in a measured filter.

Essential MacLeod
Thin Film Center, Inc.

Thin Film Center, Inc.

Optical filter design and modeling.

TFCalc
Software Spectra, Inc.

Software Spectra, Inc.

Optical filter design and modeling.

Dispersion

Rugate Technologies, Inc.

Optical filter design and modeling.

Uniformity

Rugate Technologies, Inc.

Uniformity modeling and mask generation program.

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RTI EQUIPMENT:

The following equipment is featured in our current work:

Deposition Equipment

·         Varian 3125

·         Ulvac

·         AMS

·         Spector Alpha and Beta

Metrology Equipment

·         Nicolet 460 Protégé FTIR

·         Cary 5 Spectrometer

·         Tropel 900

·         Tencor Surfscan Model 100

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Varian 3125 for Deposition

RTI is currently running two Varian 3125 chambers. They are 25" 2-door chambers, cryo-pumped, with single and multiple pocket e-guns, 2 resistive sources each, and unique water-cooled platens.

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Varians

 

Ulvac for Deposition

An ultra-high vacuum chamber with long throw height, RTI's Ulvac is a fully automated chamber with load locks for parts and crystals, a multi-pocket e-gun, and an ion source.

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Ulvac

 

AMS for Deposition

RTI's AMS is a 26" bell jar with 4 magnetron sources. It is turbo-pumped with DC, pulsed DC, and mid-frequency and RF options.

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AMS

 

Spector Alpha and Beta for Deposition

These ion-tech Spectors are equipped with e-guns, resistive sources, and IAD.

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Spectors Alpha/Beta

 

Nicolet 460 Protégé FTIR

Nicolet 460 Protégé FTIR

RTI's Nicolet 460 Protégé FTIR is equipped with an extended range beamsplitter for single scan measurements from 0.8 to 25 microns.

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Cary 5 Spectrometer

Cary 5 Spectrometer

This research grade scanning grating instrument has a spectral range of 00.15 to 3.5 microns.

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Tropel 900

Tropel 900

RTI's Tropel 900 is used to attain measurements of wafer flatness interferometrically.

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Rugate Technologies, INC. | 353 Christian Street | Oxford, CT 06478
203-267-3154 | e-mail: info@rugate.com | on the web: www.rugate.com

Copyright © 2009 Rugate Technologies, Inc., All rights reserved.