RTI's
capabilities include:
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Please see our Products and Sales page
for details on these services.
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Rugate Technologies, Inc. uses a full suite of software and
many years of experience to support filter design development and
modeling.
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Design
Program
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Source
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Description
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OptiLayer
OptiLayer Ltd.
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OptiLayer Ltd.
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Optical filter design
and modeling.
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Opti-Char
OptiLayer Ltd.
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OptiLayer Ltd.
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Used to calculate
optical properties from single layers.
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Opti-Rel
OptiLayer Ltd.
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OptiLayer Ltd.
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Used to calculate
potential errors in a measured filter.
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Essential MacLeod
Thin Film Center, Inc.
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Thin Film Center, Inc.
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Optical filter design
and modeling.
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TFCalc
Software Spectra, Inc.
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Software Spectra, Inc.
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Optical filter design
and modeling.
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Dispersion
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Rugate Technologies, Inc.
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Optical filter design
and modeling.
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Uniformity
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Rugate Technologies, Inc.
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Uniformity modeling and mask generation
program.
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RTI EQUIPMENT:
The following equipment
is featured in our current work:
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Deposition Equipment
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Metrology Equipment
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Varian 3125 for
Deposition
RTI is currently running
two Varian 3125 chambers. They are 25" 2-door chambers, cryo-pumped,
with single and multiple pocket e-guns, 2
resistive sources each, and unique water-cooled platens.
^back
to equipment listing.
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Ulvac for Deposition
An ultra-high vacuum
chamber with long throw height, RTI's
Ulvac is a fully automated chamber with load locks for parts and
crystals, a multi-pocket e-gun, and an ion
source.
^back
to equipment listing.
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AMS for Deposition
RTI's AMS is a 26" bell jar
with 4 magnetron sources. It is turbo-pumped with DC, pulsed DC, and
mid-frequency and RF options.
^back
to equipment listing.
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Spector Alpha and Beta
for Deposition
These ion-tech Spectors
are equipped with e-guns, resistive
sources, and IAD.
^back
to equipment listing.
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Nicolet 460 Protégé FTIR
RTI's Nicolet 460 Protégé
FTIR is equipped with an extended range beamsplitter
for single scan measurements from 0.8 to 25 microns.
^back
to equipment listing.
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Cary 5 Spectrometer
This research grade
scanning grating instrument has a spectral range of 00.15 to 3.5
microns.
^back
to equipment listing.
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Tropel 900
RTI's Tropel 900 is used to
attain measurements of wafer flatness interferometrically.
^back
to equipment listing.
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