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Please see our Products and Sales page for details on these services. |
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Design Program |
Source |
Description |
OptiLayer
OptiLayer Ltd. |
OptiLayer Ltd. |
Optical filter design and modeling. |
Opti-Char
OptiLayer Ltd. |
OptiLayer Ltd. |
Used to calculate optical properties from single layers. |
Opti-Rel
OptiLayer Ltd. |
OptiLayer Ltd. |
Used to calculate potential errors in a measured filter. |
Essential MacLeod
Thin Film Center, Inc. |
Thin Film Center, Inc. |
Optical filter design and modeling. |
TFCalc
Software Spectra, Inc. |
Software Spectra, Inc. |
Optical filter design and modeling. |
Dispersion |
Rugate Technologies, Inc. |
Optical filter design and modeling. |
Uniformity |
Rugate Technologies, Inc. |
Uniformity modeling and mask generation program. |
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RTI EQUIPMENT:
The following equipment is featured in our current work:
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Varian 3125 for Deposition
RTI is currently running two Varian 3125 chambers. They are 25" 2-door chambers,
cryo-pumped, with single and multiple pocket e-guns, 2 resistive sources each, and unique water-cooled platens.
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Ulvac for Deposition
An ultra-high vacuum chamber with long throw height, RTI's Ulvac is a fully automated chamber
with load locks for parts and crystals, a multi-pocket e-gun, and an ion source.
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AMS for Deposition
RTI's AMS is a 26" bell jar with 4 magnetron sources. It is turbo-pumped with DC, pulsed DC, and mid-frequency and RF options.
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Spector Alpha and Beta for Deposition
These ion-tech Spectors are equipped with e-guns, resistive sources, and IAD.
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Nicolet 460 Protégé FTIR
RTI's Nicolet 460 Protégé FTIR is equipped with an extended range
beamsplitter for single scan measurements from 0.8 to 25 microns.
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Cary 5 Spectrometer
This research grade scanning grating instrument has a spectral range of 00.15 to 3.5 microns.
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Tropel 900
RTI's Tropel 900 is used to attain measurements of wafer flatness interferometrically.
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ISI DS 130C SEM
RTI's SEM has two stages. The lower stage accommodates up to 4"
diameter wafers while the upper stage allows for maximum resolution of
small samples. Equipped with EDS and secondary electron detectors, it
provides information on film morphology, stress, and growth patterns.
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Tencor Surfscan Model 100
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