Search site:

RTI's capabilities include:

• Thin Film and Optical Coating Design
• Deposition of Complex Thin Films
• Front Surface Interference Filters for TPV Spectral Control
• Process Development for Unique Thin Film Applications
• Unique Materials Knowledge and Application
• Metrology and Thin Film Characterization
  



• RTI Development and Modeling Software
  
• RTI Equipment
  

Please see our Products and Sales page for details on these services.

RTI DEVELOPMENT AND MODELING SOFTWARE:

Rugate Technologies, Inc. uses a full suite of software and many years of experience to support filter design development and modeling.

^back to top.

RTI EQUIPMENT:

The following equipment is featured in our current work:

Deposition Equipment

• Varian 3125
• Ulvac
• AMS
• Spector Alpha and Beta

Metrology Equipment

• Nicolet 460 Protégé FTIR
• Cary 5 Spectrometer
• Tropel 900
• ISI DS 130C SEM
• Tencor Surfscan Model 100

^back to top.

Varian 3125 for Deposition

RTI is currently running two Varian 3125 chambers. They are 25" 2-door chambers, cryo-pumped, with single and multiple pocket e-guns, 2 resistive sources each, and unique water-cooled platens.

^back to equipment listing.

Ulvac for Deposition

An ultra-high vacuum chamber with long throw height, RTI's Ulvac is a fully automated chamber with load locks for parts and crystals, a multi-pocket e-gun, and an ion source.

^back to equipment listing.

AMS for Deposition

RTI's AMS is a 26" bell jar with 4 magnetron sources. It is turbo-pumped with DC, pulsed DC, and mid-frequency and RF options.

^back to equipment listing.

Spector Alpha and Beta for Deposition

These ion-tech Spectors are equipped with e-guns, resistive sources, and IAD.

^back to equipment listing.

Nicolet 460 Protégé FTIR

RTI's Nicolet 460 Protégé FTIR is equipped with an extended range beamsplitter for single scan measurements from 0.8 to 25 microns.

^back to equipment listing.

Cary 5 Spectrometer

This research grade scanning grating instrument has a spectral range of 00.15 to 3.5 microns.

^back to equipment listing.

Tropel 900

RTI's Tropel 900 is used to attain measurements of wafer flatness interferometrically.

^back to equipment listing.

ISI DS 130C SEM

RTI's SEM has two stages. The lower stage accommodates up to 4" diameter wafers while the upper stage allows for maximum resolution of small samples. Equipped with EDS and secondary electron detectors, it provides information on film morphology, stress, and growth patterns.

^back to equipment listing.

Tencor Surfscan Model 100

^back to equipment listing.